개요

The microVEGA™xMR is the first industrial annealing system for selective integrated magnetic sensor formation. Incorporating a highly flexible tool configuration with on-the-fly spot and variable laser energy, the system can accommodate both Giant Magnetoresistance (GMR) and Tunnel Magnetoresistance (TMR) sensors, as well as easily adjust magnetic orientation, sensor position and sensor dimension—making it an ideal solution for magnetic sensor production.