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CX-2LS
카테고리
Laser개요
Cymer's first prototype KrF laser for lithography. The first generation excimer laser (CX‐2LS) for lithography operated at 200 Hz and 3 W, with a spectral bandwidth of 3 pm and a wavelength stability of ±0.5 pm.
활성 등재물
0
서비스
검사, 보험, 감정, 물류
상위 등재물
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