개요

The SUMITOMO SWA-90GD is a high-performance laser annealing system designed for semiconductor manufacturing processes. It utilizes a hybrid approach, combining a solid-state laser with a long-wavelength laser (specifically, a second harmonic green laser), enabling advanced double-pulse processing. This configuration allows for deep activation up to 7 micrometers, high pulse energy stability, and in-plane uniformity with a standard deviation (σ) of less than or equal to 1%. The system is maintenance-free and features a compact design, contributing to high operational rates and reduced running costs. It is capable of handling wafer sizes up to 300mm (12 inches) and supports automatic wafer handling for wafers thinner than 70 micrometers.