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6" Fab For Sale from Moov - Click Here to Learn More
6" Fab For Sale from Moov - Click Here to Learn More
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6" Fab For Sale from Moov - Click Here to Learn More
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FX-903N

카테고리
Lithography
개요

FPD Steppers Resolution (L/S): 1.5 μm Exposure field: 132 mm square Exposure wavelength: i-line (365 nm wavelength) Projection magnification: 1:1.25 Overlay: ≦ ±0.30 μm (3σ) Maximum plate size: 730 × 920 mm Reticle size: 6-in. (0.25-in. thickness) Takt time: (30 shots) 65 seconds (50 mJ/cm2)

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