개요

The Ultratech AP300W is a type of stepper lithography system that belongs to the AP200/300 series of systems. These systems are built on Veeco’s Unity Platform™, which is customizable. The AP300W and other systems in the series are known for their excellent overlay, resolution, and side wall profile performance. They are also highly automated and cost-effective. The AP300W is particularly well-suited for applications such as copper pillar, fan-out, through-silicon via (TSV), and silicon interposer. The platform also includes many features that are specific to certain applications, which help to enable next-generation packaging techniques. Some of these features include enhanced handling of warped wafers, dual side alignment, and optical focus.