설명
Wafer Size: up to 6"환경 설정
- Topside (TSA) Alignment - Suss Dual Video Microscope DVM6 - Objectives: 5X, 10X, 20X - UV400 Optics (for 365nm and 405nm exposure) - CIC 1200 UV Power Supply - Capable of Proximity, Soft, Hard and Vacuum Contact with proper tooling. - Currently set up with 3 inch Vacuum Contact Alignment Chuck and 4 inch Mask Holder tooling, capable of Vacuum Contact, Hard and Soft Contact - 350 Watt Lamphouse (can operate w/ 200 Watt or 350 Watt HG UV lamps) - Incorporated Newport Vibration Isolation Table (for Suss MA6) - System Power: 230V, 50/60 Hz - Operations Manual for Suss MA6 Mask AlignerOEM 모델 설명
The MA6 has upgraded optics designed to output in the mid-UV (250nm) range. The lamp is controlled by a CIC 100 constant intensity controller capable of delivering user-selectable UV doses which remain stable during the life of the lamp. Optical sensors monitor the UV output dose and provide feedback to the controller. There are 2 selectable channels. Both channels operate the lamp near its “idle power” (475W) to maximize lamp life. Because the lamp operates in constant intensity mode, the actual power will vary over time as the lamp ages.문서
문서 없음
SUSS MicroTec / KARL SUSS
MA6
검증됨
카테고리
Mask Aligner
마지막 검증일: 30일 이상 전
주요 품목 세부 정보
조건:
Used
작동 상태:
알 수 없음
제품 ID:
78088
웨이퍼 사이즈:
6"/150mm
빈티지:
2001
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
유사 등재물
모두 보기SUSS MicroTec / KARL SUSS
MA6
카테고리
Mask Aligner
마지막 검증일: 30일 이상 전
주요 품목 세부 정보
조건:
Used
작동 상태:
알 수 없음
제품 ID:
78088
웨이퍼 사이즈:
6"/150mm
빈티지:
2001
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
설명
Wafer Size: up to 6"환경 설정
- Topside (TSA) Alignment - Suss Dual Video Microscope DVM6 - Objectives: 5X, 10X, 20X - UV400 Optics (for 365nm and 405nm exposure) - CIC 1200 UV Power Supply - Capable of Proximity, Soft, Hard and Vacuum Contact with proper tooling. - Currently set up with 3 inch Vacuum Contact Alignment Chuck and 4 inch Mask Holder tooling, capable of Vacuum Contact, Hard and Soft Contact - 350 Watt Lamphouse (can operate w/ 200 Watt or 350 Watt HG UV lamps) - Incorporated Newport Vibration Isolation Table (for Suss MA6) - System Power: 230V, 50/60 Hz - Operations Manual for Suss MA6 Mask AlignerOEM 모델 설명
The MA6 has upgraded optics designed to output in the mid-UV (250nm) range. The lamp is controlled by a CIC 100 constant intensity controller capable of delivering user-selectable UV doses which remain stable during the life of the lamp. Optical sensors monitor the UV output dose and provide feedback to the controller. There are 2 selectable channels. Both channels operate the lamp near its “idle power” (475W) to maximize lamp life. Because the lamp operates in constant intensity mode, the actual power will vary over time as the lamp ages.문서
문서 없음