설명
- Macobot for In-Air handling - Gas Box with SDS Bottles - Cryopumps installed - P3/P4/P5 On-Board 8 Edwards - Turbo Pumps installed - P1 STP 1003 C - P2A STP 301C - P2B STP 1003 C - Rough pumps installed - RP1 Edwards IGX 100 MTI - RP2 Edwards QDP40 - RP3 Edwards iGX600M환경 설정
환경 설정 없음OEM 모델 설명
Axcelis Technologies' 8250 medium current line uses an ultra-pure, parallel beam design enhanced by extremely precise wafer positioning, enabling the minute detailing of transistors. The 8250 provides the advanced process capabilities necessary for medium current implants. Incorporating several key productivity enhancements in its design, it offers enhanced yield and serial processing advantages. This system is a fully automated, 200mm, serial processing system designed to maximize productivity and minimize all forms of contamination. Production-proven beam optics and wafer position control deliver pure, parallel and repeatable beams. The 8250 is the industry's only medium current system to incorporate a final energy filter, ensuring maximum beam purity over the entire energy range of multiply-charged species up to 750keV. New features such as the extended life source (ELS), electrostatic chuck, fully integrated statistical process control (SPC), and slit load lock process chamber allow the 8250 to provide superior processing capability at the lowest cost of ownership.문서
문서 없음
AXCELIS
NV 8250
카테고리
Medium Current
마지막 검증일: 13일 전
주요 품목 세부 정보
조건:
Used
작동 상태:
Installed / Idle
제품 ID:
145589
웨이퍼 사이즈:
8"/200mm
빈티지:
알 수 없음
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
설명
- Macobot for In-Air handling - Gas Box with SDS Bottles - Cryopumps installed - P3/P4/P5 On-Board 8 Edwards - Turbo Pumps installed - P1 STP 1003 C - P2A STP 301C - P2B STP 1003 C - Rough pumps installed - RP1 Edwards IGX 100 MTI - RP2 Edwards QDP40 - RP3 Edwards iGX600M환경 설정
환경 설정 없음OEM 모델 설명
Axcelis Technologies' 8250 medium current line uses an ultra-pure, parallel beam design enhanced by extremely precise wafer positioning, enabling the minute detailing of transistors. The 8250 provides the advanced process capabilities necessary for medium current implants. Incorporating several key productivity enhancements in its design, it offers enhanced yield and serial processing advantages. This system is a fully automated, 200mm, serial processing system designed to maximize productivity and minimize all forms of contamination. Production-proven beam optics and wafer position control deliver pure, parallel and repeatable beams. The 8250 is the industry's only medium current system to incorporate a final energy filter, ensuring maximum beam purity over the entire energy range of multiply-charged species up to 750keV. New features such as the extended life source (ELS), electrostatic chuck, fully integrated statistical process control (SPC), and slit load lock process chamber allow the 8250 to provide superior processing capability at the lowest cost of ownership.문서
문서 없음