설명
Medium Current Ion Implanter환경 설정
-set up for 150 mm open wafer cassette loading -Gasbox for AsH3, PH3 and BF3OEM 모델 설명
Purion M medium current ion implant system. This system offer industry leading purity, precision and productivity through enhanced single magnet scanned spot beam architecture at a higher productivity (500 wafer per hour throughput) and lower cost of ownership than competitive offerings, in addition to other advantages.문서
문서 없음
AXCELIS
PURION M
카테고리
Medium Current
마지막 검증일: 60일 이상 전
주요 품목 세부 정보
조건:
Used
작동 상태:
알 수 없음
제품 ID:
132929
웨이퍼 사이즈:
6"/150mm
빈티지:
2024
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
설명
Medium Current Ion Implanter환경 설정
-set up for 150 mm open wafer cassette loading -Gasbox for AsH3, PH3 and BF3OEM 모델 설명
Purion M medium current ion implant system. This system offer industry leading purity, precision and productivity through enhanced single magnet scanned spot beam architecture at a higher productivity (500 wafer per hour throughput) and lower cost of ownership than competitive offerings, in addition to other advantages.문서
문서 없음