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pump 2환경 설정
Process Gas:CDA/N2/Ar/ASH3/BF3OEM 모델 설명
The SOPHI-200 is a compact ion implanter designed by ULVAC using their latest advanced technology. It is capable of running substrate sizes up to 200mm in diameter and comes in two energy ranges: up to 200KeV or up to 260KeV. This system is a powerful tool for ion implantation and is suitable for a wide range of applications.문서
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ULVAC
SOPHI-200
카테고리
Medium Current
마지막 검증일: 60일 이상 전
주요 품목 세부 정보
조건:
Used
작동 상태:
알 수 없음
제품 ID:
130326
웨이퍼 사이즈:
6"/150mm
빈티지:
2007
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
설명
pump 2환경 설정
Process Gas:CDA/N2/Ar/ASH3/BF3OEM 모델 설명
The SOPHI-200 is a compact ion implanter designed by ULVAC using their latest advanced technology. It is capable of running substrate sizes up to 200mm in diameter and comes in two energy ranges: up to 200KeV or up to 260KeV. This system is a powerful tool for ion implantation and is suitable for a wide range of applications.문서
문서 없음