ONTO / NANOMETRICS / ACCENT / BIO-RAD VerteX

설명

Metrology

환경 설정

2x Loadport Fortrend

OEM 모델 설명

Vertex is the latest addition to the RPM family and is designed to deliver industry-leading accuracy, repeatability, and tool-to-tool matching. It is a PL Mapping System with Power Density Control that brings the PL measurement process under control, ensuring that your epitaxial process stays firmly under control. Vertex provides accurate, precise, and repeatable PL metrology across the entire wavelength range, including high-Al content AlGaN alloys for GaN FET’s and UV lasers to the Antimonides out in the MIR and everything in between. It offers a catalog of more than 15 standard lasers and the ability to fiber-feed a virtually unlimited array of sources. The monochromator can be fitted with up to three gratings and two array detectors, and every optical component is selected under computer control. Vertex also contains its own built-in spectral source for monochromator calibration. The system can accommodate up to 4 internally mounted lasers, two of which feature a continuously-variable power control with feedback loop. Large lasers can be fiber-connected, and for film thickness measurements, the system can be fitted with a white light source. The Vertex software also includes a Fourier Transform facility for data interpretation.