RS75
카테고리
Metrology개요
The OmniMap RS75 is a four-point probe series that offers precise sheet resistance measurements for monitor wafers. It is faster than existing systems and is suitable for a variety of semiconductor process monitoring applications, including ion implantation, metal deposition, CMP, diffusion, polysilicon, epi, RTP, and bulk silicon. The system can process over 100 wafers per hour when conducting a five-site test on 200 mm wafers, with temperature compensation and flat alignment. A 49-site contour map with temperature compensation can be completed on a manually loaded test wafer in less than sixty seconds. This makes the OmniMap RS75 a production-worthy tool for sheet resistance mapping.
활성 등재물
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서비스
검사, 보험, 감정, 물류
상위 등재물
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