FLX 5400
카테고리
Metrology개요
The Tencor FLX-5400 is an automated wafer handling system that uses patented dual wavelength technology to create 2D and 3D maps of radial stress. It has a unique calibration algorithm and automatic substrate thickness determination for enhanced measurement accuracy.
활성 등재물
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서비스
검사, 보험, 감정, 물류
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