개요

LTA-700 is a variable injection type wafer lifetime measuring system designed to assess the carrier recombination lifetime in semiconductor wafers. This measurement is crucial for evaluating the quality and performance of silicon wafers used in semiconductor devices. The system operates based on the Microwave PhotoConductivity Decay (μ-PCD) method, where a laser injects carriers into the wafer, and the subsequent decay is monitored using a microwave antenna detector. This approach allows for precise lifetime measurements, aiding in the development and quality control of semiconductor materials.