SEMILAB PMR-3000 is an in-line monitoring unit for ion implantation monitoring use prior to the thermal annealing process step.

SEMILAB

PMR-3000

The MCV automatic mapping systems provide a Mercury C-V measurement for non-patterned wafers used in epitaxial silicon production and front-end semiconductor processing.

MCV 2500

Mask & Wafer Inspection
designed to provide world-leading, non-contact fast monitoring of heavy metal contamination, including sub 108 atoms/cm-3 Fe detection, with automated wafer handling from dual FOUP loadport loading stations fully capable of supporting the most demanding high-volume manufacturing environment.

FAAST 350

The MCV-530 system is designed for the fast and reliable testing of dielectric and epitaxial layers by mercury probe, and it is ideal for R&D or small volume production.

Manual loading systems, however they have the same measurement abilities like the automatic MCV-2200/2500 product.

MCV 530

-Wafer handling: Robot up to 300 mm
-Inspected area: Full sheet wafers
-Probes: 4PP (FEOL & BEOL) , EDDY (BEOL) , JPV (FEOL)
-1-4 permanent 4PP heads for different ranges & applications, Lower CoO
-Implant dose range: 1012 to 5×1015 1/cm2
-Cleanroom class: class 1 minienvironment

SEMILAB

개요

활성 등재물

총 제품 수

서비스

상위 SEMILAB Metrology

PMR-3000

2 등재물

MCV 2500

1 등재물

FAAST 350

1 등재물

MCV 530

0 등재물

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모든 SEMILAB Metrology