설명
Electrical Property Monitoring환경 설정
환경 설정 없음OEM 모델 설명
The FAaST 300 SL system is a non-contact electrical metrology system that combines both Micro and Macro corona-Kelvin methods into a single platform. It is designed to support advanced R&D as well as high-volume manufacturing environments. The system features automatic robotic wafer handling, dual FOUP Loadport, and is suitable for patterned wafer and monitor wafer measurements. It uses Semilab SDI’s patented high-resolution Micro corona-Kelvin based on Kelvin Probe Force Microscopy (KPFM) for measurement of dielectric and interface properties. The system also includes an advanced 2-step Non-Visual Defect (NVD) Inspection that combines full wafer Macro surface voltage imaging and focused high-resolution intra-die surface voltage imaging using KPFM. The FAaST software package includes Measurement, Recipe Writing, and Data Viewing applications. The system is suitable for measurement on semiconductors with high-k and low-k dielectric films, and is available in a default configuration for 300mm wafers or with an option for 200mm/300mm bridge configuration. Additional options include a Mini-environment, 300mm Semi compliant Automation, Seismic brackets, wafer OCR, RFID, cassette barcode reader, and a 1000V Vcpd measurement range.문서
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SEMILAB
FAAST 300 SL
검증됨
카테고리
Metrology
마지막 검증일: 30일 이상 전
주요 품목 세부 정보
조건:
Used
작동 상태:
알 수 없음
제품 ID:
99220
웨이퍼 사이즈:
12"/300mm
빈티지:
2006
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
유사 등재물
모두 보기SEMILAB
FAAST 300 SL
카테고리
Metrology
마지막 검증일: 30일 이상 전
주요 품목 세부 정보
조건:
Used
작동 상태:
알 수 없음
제품 ID:
99220
웨이퍼 사이즈:
12"/300mm
빈티지:
2006
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
설명
Electrical Property Monitoring환경 설정
환경 설정 없음OEM 모델 설명
The FAaST 300 SL system is a non-contact electrical metrology system that combines both Micro and Macro corona-Kelvin methods into a single platform. It is designed to support advanced R&D as well as high-volume manufacturing environments. The system features automatic robotic wafer handling, dual FOUP Loadport, and is suitable for patterned wafer and monitor wafer measurements. It uses Semilab SDI’s patented high-resolution Micro corona-Kelvin based on Kelvin Probe Force Microscopy (KPFM) for measurement of dielectric and interface properties. The system also includes an advanced 2-step Non-Visual Defect (NVD) Inspection that combines full wafer Macro surface voltage imaging and focused high-resolution intra-die surface voltage imaging using KPFM. The FAaST software package includes Measurement, Recipe Writing, and Data Viewing applications. The system is suitable for measurement on semiconductors with high-k and low-k dielectric films, and is available in a default configuration for 300mm wafers or with an option for 200mm/300mm bridge configuration. Additional options include a Mini-environment, 300mm Semi compliant Automation, Seismic brackets, wafer OCR, RFID, cassette barcode reader, and a 1000V Vcpd measurement range.문서
문서 없음