설명
LightSPEED "Standard" (200mm compliant) Dark Field & Doppler detection capability Sensitivity down to 50nm on Si Transparent and opaque wafers Automated Defect Classification (ADC) Standard result file generation FFU on module Throughput • High Sensitivity Mode : 25 wafers per hour High ThroughtPut Mode: 70 wafers per hour EFEM two Loadports with vacuum handling EFEM two load ports SMIF pod 200mm compliant Light tower 4 colors Wafer ID reader (Backside) FFU on EFEM Integration of RFID reader for SMIF pod TAG (design and material provided by OSRAM) Factory Automation: Including SECS/GEM, compatible with ATV (E84 compliant with exception of PIO sensor환경 설정
Application: Frontside Unpattern inspection 2 GaAs (thickness 675 um) Sapphire (thickness 600-2000 um) SiliconOEM 모델 설명
미제공문서
문서 없음
카테고리
Metrology
마지막 검증일: 9일 전
주요 품목 세부 정보
조건:
Used
작동 상태:
알 수 없음
제품 ID:
147462
웨이퍼 사이즈:
8"/200mm
빈티지:
2022
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
UNITY SEMICONDUCTOR / HSEB
Lightspeed
카테고리
Metrology
마지막 검증일: 9일 전
주요 품목 세부 정보
조건:
Used
작동 상태:
알 수 없음
제품 ID:
147462
웨이퍼 사이즈:
8"/200mm
빈티지:
2022
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
설명
LightSPEED "Standard" (200mm compliant) Dark Field & Doppler detection capability Sensitivity down to 50nm on Si Transparent and opaque wafers Automated Defect Classification (ADC) Standard result file generation FFU on module Throughput • High Sensitivity Mode : 25 wafers per hour High ThroughtPut Mode: 70 wafers per hour EFEM two Loadports with vacuum handling EFEM two load ports SMIF pod 200mm compliant Light tower 4 colors Wafer ID reader (Backside) FFU on EFEM Integration of RFID reader for SMIF pod TAG (design and material provided by OSRAM) Factory Automation: Including SECS/GEM, compatible with ATV (E84 compliant with exception of PIO sensor환경 설정
Application: Frontside Unpattern inspection 2 GaAs (thickness 675 um) Sapphire (thickness 600-2000 um) SiliconOEM 모델 설명
미제공문서
문서 없음