설명
GaN Epitaxy 6"/8" Bridge tool Min. surface needed: 7113mm x 3665mm including maintenance area환경 설정
Maximum ventilation limit a. N2 b. H2 300slm c. NH3 100 slm d. Space e. SiH4 / H2 ≤ 2% 5slm f. Space g. C2H4 5 slm h. Cl2 3slm i. N2 tech j. Ar Cooling System drawing à Continuous flow of cooling water required, the installation of an emergency cooling circuit is strongly recommended. Operating pressure inside system: max. 6bargOEM 모델 설명
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AIXTRON
AIX G5+
카테고리
MOCVD
마지막 검증일: 30일 이상 전
주요 품목 세부 정보
조건:
Used
작동 상태:
알 수 없음
제품 ID:
146871
웨이퍼 사이즈:
6"/150mm, 8"/200mm
빈티지:
2021
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
설명
GaN Epitaxy 6"/8" Bridge tool Min. surface needed: 7113mm x 3665mm including maintenance area환경 설정
Maximum ventilation limit a. N2 b. H2 300slm c. NH3 100 slm d. Space e. SiH4 / H2 ≤ 2% 5slm f. Space g. C2H4 5 slm h. Cl2 3slm i. N2 tech j. Ar Cooling System drawing à Continuous flow of cooling water required, the installation of an emergency cooling circuit is strongly recommended. Operating pressure inside system: max. 6bargOEM 모델 설명
미제공문서
문서 없음