설명
Overlay Measurement System환경 설정
Archer TL150i main attributes / components - • Archer TL150i is a high-performance overlay metrology tool for advanced technology nodes, enabling OPO requirements below 2.5nm. Its unique pupil-based scatterometry configuration, combined with full spectrum wave tuning capability, enables customized selection of working wavelength and bandwidth per layer. This results in optimized performance for the most accurate and robust measurement. Archer TL150i is equipped with an ultra-high brightness super-continuum laser, providing high speed scanning of the overlay cell, and a small spot for minimizing cell-edge effects. It is also equipped with an ADS (active damping system) enhanced stage, allowing faster motion and reduced measurement noise. Combined with new advanced algorithms that use multiple signals to improve measurement accuracy, Archer TL150i provides best in class overlay results.OEM 모델 설명
미제공문서
문서 없음
KLA
ATL150i
카테고리
Overlay
마지막 검증일: 3일 전
주요 품목 세부 정보
조건:
Used
작동 상태:
알 수 없음
제품 ID:
155068
웨이퍼 사이즈:
12"/300mm
빈티지:
알 수 없음
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
설명
Overlay Measurement System환경 설정
Archer TL150i main attributes / components - • Archer TL150i is a high-performance overlay metrology tool for advanced technology nodes, enabling OPO requirements below 2.5nm. Its unique pupil-based scatterometry configuration, combined with full spectrum wave tuning capability, enables customized selection of working wavelength and bandwidth per layer. This results in optimized performance for the most accurate and robust measurement. Archer TL150i is equipped with an ultra-high brightness super-continuum laser, providing high speed scanning of the overlay cell, and a small spot for minimizing cell-edge effects. It is also equipped with an ADS (active damping system) enhanced stage, allowing faster motion and reduced measurement noise. Combined with new advanced algorithms that use multiple signals to improve measurement accuracy, Archer TL150i provides best in class overlay results.OEM 모델 설명
미제공문서
문서 없음