설명
[OPM NEW & 2nd SOURCE NEW ONLY] Technical Specifications: 8-inch AlN Ceramic Heater (PN: 0010-02342) Core Performance & Thermal Properties Wafer Size: Optimized for 200mm (8-inch) semiconductor platforms. Operating Temperature: Recommended up to < 700°C. Thermal Conductivity: High-grade 170 W/m·K for efficient and uniform heat transfer. Thermal Expansion: Coefficient similar to Silicon (Si), minimizing wafer stress and displacement during thermal cycling. Temperature Uniformity: Excellent across the 8-inch surface, ensuring consistent process results. Material & Reliability Material: High-purity Aluminum Nitride (AlN) Ceramic. Plasma Resistance: Excellent durability against aggressive etching and cleaning gases (NF3, CF4, etc.). Anti-Corrosion: Superior chemical resistance for stable performance in harsh vacuum environments. Durability: Robust mechanical design for long-lifecycle performance in 200mm fab lines.환경 설정
환경 설정 없음OEM 모델 설명
Ceramic Heater문서
문서 없음
카테고리
Parts
마지막 검증일: 5일 전
주요 품목 세부 정보
조건:
New
작동 상태:
Deinstalled
제품 ID:
145692
웨이퍼 사이즈:
8"/200mm
빈티지:
알 수 없음
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
APPLIED MATERIALS (AMAT)
0010-02342
카테고리
Parts
마지막 검증일: 5일 전
주요 품목 세부 정보
조건:
New
작동 상태:
Deinstalled
제품 ID:
145692
웨이퍼 사이즈:
8"/200mm
빈티지:
알 수 없음
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
설명
[OPM NEW & 2nd SOURCE NEW ONLY] Technical Specifications: 8-inch AlN Ceramic Heater (PN: 0010-02342) Core Performance & Thermal Properties Wafer Size: Optimized for 200mm (8-inch) semiconductor platforms. Operating Temperature: Recommended up to < 700°C. Thermal Conductivity: High-grade 170 W/m·K for efficient and uniform heat transfer. Thermal Expansion: Coefficient similar to Silicon (Si), minimizing wafer stress and displacement during thermal cycling. Temperature Uniformity: Excellent across the 8-inch surface, ensuring consistent process results. Material & Reliability Material: High-purity Aluminum Nitride (AlN) Ceramic. Plasma Resistance: Excellent durability against aggressive etching and cleaning gases (NF3, CF4, etc.). Anti-Corrosion: Superior chemical resistance for stable performance in harsh vacuum environments. Durability: Robust mechanical design for long-lifecycle performance in 200mm fab lines.환경 설정
환경 설정 없음OEM 모델 설명
Ceramic Heater문서
문서 없음