설명
[2nd SOURCE NEW ONLY] ## Technical Specifications: 8-inch Plasma Chuck Assy (PN: 0010-38437) Core Features & Performance Type: Plasma Chuck / Heater Chuck Assembly. Wafer Size: Optimized for 200mm (8-inch) platforms. Operating Temperature: Stable performance up to < 700°C. Thermal Conductivity: High-grade 170 W/m·K for superior thermal response. Chucking Function: Engineered for secure wafer clamping and RF grounding during plasma operations. Material & Reliability Material: High-purity Aluminum Nitride (AlN) Ceramic base. Plasma Resistance: Excellent durability against aggressive etching and PECVD cleaning gases. Anti-Corrosion: Superior resistance to chemical erosion in high-vacuum environments. Durability: Robust mechanical construction for extended MTBF (Mean Time Between Failures).환경 설정
환경 설정 없음OEM 모델 설명
미제공문서
문서 없음
카테고리
Parts
마지막 검증일: 5일 전
주요 품목 세부 정보
조건:
New
작동 상태:
Deinstalled
제품 ID:
145690
웨이퍼 사이즈:
8"/200mm
빈티지:
알 수 없음
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
APPLIED MATERIALS (AMAT)
0010-38437
카테고리
Parts
마지막 검증일: 5일 전
주요 품목 세부 정보
조건:
New
작동 상태:
Deinstalled
제품 ID:
145690
웨이퍼 사이즈:
8"/200mm
빈티지:
알 수 없음
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
설명
[2nd SOURCE NEW ONLY] ## Technical Specifications: 8-inch Plasma Chuck Assy (PN: 0010-38437) Core Features & Performance Type: Plasma Chuck / Heater Chuck Assembly. Wafer Size: Optimized for 200mm (8-inch) platforms. Operating Temperature: Stable performance up to < 700°C. Thermal Conductivity: High-grade 170 W/m·K for superior thermal response. Chucking Function: Engineered for secure wafer clamping and RF grounding during plasma operations. Material & Reliability Material: High-purity Aluminum Nitride (AlN) Ceramic base. Plasma Resistance: Excellent durability against aggressive etching and PECVD cleaning gases. Anti-Corrosion: Superior resistance to chemical erosion in high-vacuum environments. Durability: Robust mechanical construction for extended MTBF (Mean Time Between Failures).환경 설정
환경 설정 없음OEM 모델 설명
미제공문서
문서 없음