설명
No HDD, No missing parts Missing/Damaged Parts List None report, please inspect tool to reconfirm Dry pumps not included환경 설정
Process: NIT Configured with 3 chambers Technology: PECVD Platform Type: PRODUCER SE System Software System software: B2.4_51 Chamber Configuration Chamber Type: PECVD Lid: none micrometers Lid Mixing Insert: no use Liner: NA Blocker: 0021-12790 Faceplate: 0020-84596 NDIR Endpoint Detector: No Heater: Heater ASSY, HA12, MC, CIP Slit Valve: Valqua Isolation Valve: 0190-08201 Throttle Valve: 0190-12708 Heater Lift Driver: 0190-13840 RPS: 0920-00013 Gas Box Configuration: VCR TYPE FOR MFC Gas Line 1: SiH4 Lo 0.5SLM Gas Line 2: SiH4 2SLM Gas Line 3: empty Gas Line 4: H2 2SLM Gas Line 5: NF3 5SLM Gas Line 6: NH3 0.7SLM Gas Line 7: HE 15SLM Gas Line 8: AR 10SLM Gas Line 9: empty Gas Line 10: N2O Hi 15SLM Gas Line 11: N2O Lo 2SLM Gas Line 12: N2 25SLM Gas Line 13: empty Gas Line 14: empty Gas Line 15: empty Gas Line 16: empty Liquid 1: empty Liquid 2: empty Liquid 3: empty Injector-TEB: empty Injector-TEPO: empty Injector-TEOS: empty Process Pump/Abatement BOC Edwards: Edwards iH1000 Ozone Rack Cooling: N/A Kit Parts: BLOCKER PLATE: 0021-12790 FACE PLATE: 0020-84596 GASBOX: 0040-53688 TOP CERAMIC LINER: 0200-04654 MIDDLE CERAMIC LINER: 0200-02396 BOTTOM CERAMIC LINER: 0200-02397 ALUMINUM PUMPING RING: 0200-02407/0200-02408 VACUUM CHUCK HEATER ASSY: 0010-24300 LIFT PINS: 0200-03269 LIFT RING Captive 300MM PRODUCER SE: N/A LIFT HOOP: 0200-01991 ISOLATOR: 0200-04235 LIFT RING SCREW: 0021-26158 ISO VALVE: 0190-08201 THROTTLE VALVE: 0190-12708 Abatement System Model: 4xinlet Vendor: DAS Heat wrap: 150 Heat Exchanger Model: H2000 Vendor: SMC Thermo Chiller Process Chamber Pump Vendor: Edwards iH1000 Heater Jacket @foreline: Yes Heater Jacket @ exhaust to scrubber: YesOEM 모델 설명
The Applied Materials PRODUCER SE is a chemical vapor deposition (CVD) system manufactured by Applied Materials, Inc. It is designed for depositing thin films onto semiconductor wafers in the semiconductor manufacturing process.문서
카테고리
PECVD
마지막 검증일: 60일 이상 전
주요 품목 세부 정보
조건:
Used
작동 상태:
알 수 없음
제품 ID:
115317
웨이퍼 사이즈:
알 수 없음
빈티지:
2005
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
유사 등재물
모두 보기
APPLIED MATERIALS (AMAT)
PRODUCER SE
카테고리
PECVD
마지막 검증일: 60일 이상 전
주요 품목 세부 정보
조건:
Used
작동 상태:
알 수 없음
제품 ID:
115317
웨이퍼 사이즈:
알 수 없음
빈티지:
2005
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available