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Technical Specifications •Handles up to 200mm wafer diameter •lower temperatures (180° to 400°C) • Thicker films (≥20µm) Key Applications •low k • thermal films, high-temperature PECVD •SiO2,SiON,SiNx,A-Si •APF(Advance patterning film) •NFARL (nitrogen free anti-reflective layer) ASSETS OF PRODUCER III 1 AMAt TC Producer Model: Producer III 2 AMAt TC Producer Model: SE Carbon (GST) NIL 3 Heat Exchanger Model: SteelHead-0 4 DPA RF Generator Model: DPG-10 5 Amat Producer Gas Panel NIL 6 Dry Gas Abatement System Model: CS195SC 7 Dry Vacuum Pump Model:ADS602P 8 Dry Vacuum Pump Model:ADS602P 9 Dry Vacuum Pump Model:ADS602P 10 3 Phase Transformer of 160 kVAOEM 모델 설명
Our Producer platform is the fastest and most cost-effective in the industry, capable of processing more than three wafers every minute in a highly compact footprint. It features a robot that can simultaneously transfer four wafers between its three paired processing stations and unique double-decker vacuum loadlocks.문서
카테고리
PECVD
마지막 검증일: 60일 이상 전
주요 품목 세부 정보
조건:
Used
작동 상태:
알 수 없음
제품 ID:
131951
웨이퍼 사이즈:
8"/200mm
빈티지:
2008
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
유사 등재물
모두 보기
APPLIED MATERIALS (AMAT)
PRODUCER III
카테고리
PECVD
마지막 검증일: 60일 이상 전
주요 품목 세부 정보
조건:
Used
작동 상태:
알 수 없음
제품 ID:
131951
웨이퍼 사이즈:
8"/200mm
빈티지:
2008
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available