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OXFORD PLASMALAB 100
  • OXFORD PLASMALAB 100
  • OXFORD PLASMALAB 100
  • OXFORD PLASMALAB 100
  • OXFORD PLASMALAB 100
  • OXFORD PLASMALAB 100
  • OXFORD PLASMALAB 100
  • OXFORD PLASMALAB 100
설명
There are 3 main problems with the system: 1) Neither AMU is in working condition 2) There is an internal leak in the system, which we believe is coming from CDA and/or related to the slit valve. 3) The backing pumps have failed repeated, likely related to vacuum leak The status of parts on the tool: 1) ICP AMU – Installed, not working 2) RIE AMU – Not installed, but we have the original unit. The original unit does not work. 3) ICP Power Supply – Not installed. Unsure if working. 4) Endpoint detection system – Not installed. Unsure if working. 5) Backing pump – None, two prior pumps have failed 6) All other parts of the tool are present and installed. Besides the vacuum leak, all other parts were working at last shutdown.
환경 설정
Gases: -Process Delivery Line -CH4 – Methane -H2 – Hydrogen -CHF3 – Trifluoromethane -O2 – Oxygen -CF4 – Tetraflouromethane -Ar – Argon -N2 – Nitrogen -HBr – Hydrogen Bromine
OEM 모델 설명
The Oxford Plasmalab 100 is an inductively coupled plasma (ICP) etcher that is designed for multipurpose use. It is based on fluorocarbon and is capable of anisotropically etching silicon, silicon oxide, and other dielectric materials. The tool is equipped with a temperature-controlled electrode, which allows users to tailor their etch feature profiles. The manual load system can accommodate substrates of various sizes, ranging from 200mm diameter wafers down to small pieces
문서

문서 없음

카테고리
PECVD

마지막 검증일: 30일 이상 전

주요 품목 세부 정보

조건:

Used


작동 상태:

알 수 없음


제품 ID:

116201


웨이퍼 사이즈:

알 수 없음


빈티지:

알 수 없음


Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available

OXFORD

PLASMALAB 100

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검증됨
카테고리
PECVD
마지막 검증일: 30일 이상 전
listing-photo-637ad81b7348447cab93601ac6549e04-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/76058/637ad81b7348447cab93601ac6549e04/d49d83e90deb44df9ba79b465a7b9db1_image25_mw.jpg
listing-photo-637ad81b7348447cab93601ac6549e04-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/76058/637ad81b7348447cab93601ac6549e04/934f8253403244ad925b865df9836811_image26_mw.jpg
listing-photo-637ad81b7348447cab93601ac6549e04-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/76058/637ad81b7348447cab93601ac6549e04/a1810aa0a9974ab697f1ad504f877248_image27_mw.jpg
listing-photo-637ad81b7348447cab93601ac6549e04-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/76058/637ad81b7348447cab93601ac6549e04/2098b137d6d54a029a5c24cc76832769_image28_mw.jpg
listing-photo-637ad81b7348447cab93601ac6549e04-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/76058/637ad81b7348447cab93601ac6549e04/21a135bad71e47928a1ef91438b36276_image29_mw.jpg
listing-photo-637ad81b7348447cab93601ac6549e04-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/76058/637ad81b7348447cab93601ac6549e04/9423178c6b6d4a70b41c6929090eb97f_image31_mw.jpg
listing-photo-637ad81b7348447cab93601ac6549e04-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/76058/637ad81b7348447cab93601ac6549e04/bab590e7d1764a0d91204e433e3fac63_image30_mw.jpg
주요 품목 세부 정보

조건:

Used


작동 상태:

알 수 없음


제품 ID:

116201


웨이퍼 사이즈:

알 수 없음


빈티지:

알 수 없음


Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
설명
There are 3 main problems with the system: 1) Neither AMU is in working condition 2) There is an internal leak in the system, which we believe is coming from CDA and/or related to the slit valve. 3) The backing pumps have failed repeated, likely related to vacuum leak The status of parts on the tool: 1) ICP AMU – Installed, not working 2) RIE AMU – Not installed, but we have the original unit. The original unit does not work. 3) ICP Power Supply – Not installed. Unsure if working. 4) Endpoint detection system – Not installed. Unsure if working. 5) Backing pump – None, two prior pumps have failed 6) All other parts of the tool are present and installed. Besides the vacuum leak, all other parts were working at last shutdown.
환경 설정
Gases: -Process Delivery Line -CH4 – Methane -H2 – Hydrogen -CHF3 – Trifluoromethane -O2 – Oxygen -CF4 – Tetraflouromethane -Ar – Argon -N2 – Nitrogen -HBr – Hydrogen Bromine
OEM 모델 설명
The Oxford Plasmalab 100 is an inductively coupled plasma (ICP) etcher that is designed for multipurpose use. It is based on fluorocarbon and is capable of anisotropically etching silicon, silicon oxide, and other dielectric materials. The tool is equipped with a temperature-controlled electrode, which allows users to tailor their etch feature profiles. The manual load system can accommodate substrates of various sizes, ranging from 200mm diameter wafers down to small pieces
문서

문서 없음