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OXFORD PLASMALAB 100
  • OXFORD PLASMALAB 100
  • OXFORD PLASMALAB 100
  • OXFORD PLASMALAB 100
  • OXFORD PLASMALAB 100
  • OXFORD PLASMALAB 100
  • OXFORD PLASMALAB 100
  • OXFORD PLASMALAB 100
  • OXFORD PLASMALAB 100
  • OXFORD PLASMALAB 100
  • OXFORD PLASMALAB 100
설명
설명 없음
환경 설정
PECVD Gases: Ar - 500 sccm NH3 - 50 sccm 5%SiH4/N2 - 1000 sccm CF4 - 500 sccm O2 - 500 sccm N2O - 2000 sccm N2 - 2000 sccm CB1 - Main Circuit Breaker CB2 - PSU CB3 - Not Used CB4 - RF Generator CB5 - LF Generator CB6 - TEOS CB7 - Not Used CB8 - Foreline Heat CB9 - Table Heat CB10 - Chamber Heat CB11 - Pumpdown Heat CB12 - Chamber Pump CB13 - Loadlock Pump CB14 - Not Used
OEM 모델 설명
The Oxford Plasmalab 100 is an inductively coupled plasma (ICP) etcher that is designed for multipurpose use. It is based on fluorocarbon and is capable of anisotropically etching silicon, silicon oxide, and other dielectric materials. The tool is equipped with a temperature-controlled electrode, which allows users to tailor their etch feature profiles. The manual load system can accommodate substrates of various sizes, ranging from 200mm diameter wafers down to small pieces
문서

문서 없음

카테고리
PECVD

마지막 검증일: 60일 이상 전

주요 품목 세부 정보

조건:

Used


작동 상태:

Installed / Idle


제품 ID:

81699


웨이퍼 사이즈:

알 수 없음


빈티지:

2011


Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available

OXFORD

PLASMALAB 100

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검증됨
카테고리
PECVD
마지막 검증일: 60일 이상 전
listing-photo-a474ce9fe7404445be0c661a7c573a35-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/73024/a474ce9fe7404445be0c661a7c573a35/2122157b8b534a4caadb38a679c80b8d_f18883db8295412b87e122592e345232_mw.jpeg
listing-photo-a474ce9fe7404445be0c661a7c573a35-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/73024/a474ce9fe7404445be0c661a7c573a35/12dba54a4a0a493c83f89220b7e79ff6_1f8484b63085410ea82f3a241d5f6553_mw.jpeg
listing-photo-a474ce9fe7404445be0c661a7c573a35-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/73024/a474ce9fe7404445be0c661a7c573a35/5a4480378d8647638574ecd1e184b9a0_7ef374e3d5d246ada3b183ef137ff484_mw.jpeg
listing-photo-a474ce9fe7404445be0c661a7c573a35-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/73024/a474ce9fe7404445be0c661a7c573a35/9be7386faead41569981c3ef8593ed18_efe986b3c280435085f852d8bd7250f21201a_mw.jpeg
listing-photo-a474ce9fe7404445be0c661a7c573a35-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/73024/a474ce9fe7404445be0c661a7c573a35/d25fd5368241469fa75fd648ab17d014_bffb65934b8a4e59a410eb64f4336ce51201a_mw.jpeg
listing-photo-a474ce9fe7404445be0c661a7c573a35-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/73024/a474ce9fe7404445be0c661a7c573a35/9bee24ed3fae48d9848016dba32fe866_23c1f11be5ff4ad18591679b2c37354c_mw.jpeg
listing-photo-a474ce9fe7404445be0c661a7c573a35-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/73024/a474ce9fe7404445be0c661a7c573a35/e6025e20ae5d44e4b05439c89159893a_729f3b8d12d146498dd4da993b47d61f_mw.jpeg
listing-photo-a474ce9fe7404445be0c661a7c573a35-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/73024/a474ce9fe7404445be0c661a7c573a35/9b918554afac43dc81dc2ea37036c4b8_c54a59340101480bbff99a7db019b3e5_mw.jpeg
listing-photo-a474ce9fe7404445be0c661a7c573a35-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/73024/a474ce9fe7404445be0c661a7c573a35/3e50171efcf34f6e87068a6ce2d727e9_5eecbf6b806c46f7b931c135871d09801201a_mw.jpeg
listing-photo-a474ce9fe7404445be0c661a7c573a35-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/73024/a474ce9fe7404445be0c661a7c573a35/dd44921c9c064a789e42227f448b9963_7268e49305e9479baebe593330ddfd64_mw.jpeg
주요 품목 세부 정보

조건:

Used


작동 상태:

Installed / Idle


제품 ID:

81699


웨이퍼 사이즈:

알 수 없음


빈티지:

2011


Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
설명
설명 없음
환경 설정
PECVD Gases: Ar - 500 sccm NH3 - 50 sccm 5%SiH4/N2 - 1000 sccm CF4 - 500 sccm O2 - 500 sccm N2O - 2000 sccm N2 - 2000 sccm CB1 - Main Circuit Breaker CB2 - PSU CB3 - Not Used CB4 - RF Generator CB5 - LF Generator CB6 - TEOS CB7 - Not Used CB8 - Foreline Heat CB9 - Table Heat CB10 - Chamber Heat CB11 - Pumpdown Heat CB12 - Chamber Pump CB13 - Loadlock Pump CB14 - Not Used
OEM 모델 설명
The Oxford Plasmalab 100 is an inductively coupled plasma (ICP) etcher that is designed for multipurpose use. It is based on fluorocarbon and is capable of anisotropically etching silicon, silicon oxide, and other dielectric materials. The tool is equipped with a temperature-controlled electrode, which allows users to tailor their etch feature profiles. The manual load system can accommodate substrates of various sizes, ranging from 200mm diameter wafers down to small pieces
문서

문서 없음