설명
the pc can be power on, but chamber is already vacuum packed환경 설정
OXFORD PlasmaPro 100 PECVD System Deposition lower electrode kit ADVANCED ENERGY / DRESSLER RF 600W Generator AMU Match INFICON 5T CM Gauge kit ALCATEL / ADIXEN / PFEIFFER A604H Pump kit Pump cable, 10 m Isolation valve ALCATEL / ADIXEN / PFEIFFER ACP 15D Dry pump kit Single wafer load lock kit Gas pod (8) Gas lines Gases: SIH4, NH3, GN2, CF4, N2O Mass Flow Controller (MFC) PC Monitor, 19" Power supply: 400 V, 3 Phase, 50 Hz 2018 vintage.OEM 모델 설명
The PECVD process modules are specifically designed to produce excellent uniformity and high rate films, with control of film properties such as refractive index, stress, electrical characteristics and wet chemical etch rate.문서
문서 없음
카테고리
PECVD
마지막 검증일: 어제
주요 품목 세부 정보
조건:
Used
작동 상태:
알 수 없음
제품 ID:
139842
웨이퍼 사이즈:
알 수 없음
빈티지:
2018
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
OXFORD
PLASMAPRO 100 PECVD
카테고리
PECVD
마지막 검증일: 어제
주요 품목 세부 정보
조건:
Used
작동 상태:
알 수 없음
제품 ID:
139842
웨이퍼 사이즈:
알 수 없음
빈티지:
2018
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
설명
the pc can be power on, but chamber is already vacuum packed환경 설정
OXFORD PlasmaPro 100 PECVD System Deposition lower electrode kit ADVANCED ENERGY / DRESSLER RF 600W Generator AMU Match INFICON 5T CM Gauge kit ALCATEL / ADIXEN / PFEIFFER A604H Pump kit Pump cable, 10 m Isolation valve ALCATEL / ADIXEN / PFEIFFER ACP 15D Dry pump kit Single wafer load lock kit Gas pod (8) Gas lines Gases: SIH4, NH3, GN2, CF4, N2O Mass Flow Controller (MFC) PC Monitor, 19" Power supply: 400 V, 3 Phase, 50 Hz 2018 vintage.OEM 모델 설명
The PECVD process modules are specifically designed to produce excellent uniformity and high rate films, with control of film properties such as refractive index, stress, electrical characteristics and wet chemical etch rate.문서
문서 없음