설명
Comdel CX-2500/6.78 MHz 2500 W RF Generator, PN: FP3368R1 Description: The CX-2500 power supply has a power range of 2500 Watts with a fixed frequency of 6.78 MHz. The solid-state design provides low cost of ownership with high reliability. Applications: The CX series is designed to meet the performance demand in RF-driven plasma systems for semiconductor processing. Applications include etch, RIE, parallel plate, ICP, RF sputtering, CVD and PVD, as well as induction and dielectric heating processes in industrial systems.환경 설정
The Unit's Serial Number Tag Reads: Model Number: CX-2500/6.78 Serial Number: 091 Part Number: FP3368R1 Date of Manufacturing: 10/29/99 Specifications: Power Output: 2500 W Harmonic Distortion: Less than -30 dBc Power Requirements: 190-225 VAC; Three Phase; 50/60 Hz / 15 A typical Control I/O Connector: 25-pin subiminiature D type Std. Output Connector: Type-N Power Control: 0-10 VDC input for 0 to maximum-rated output Power Control Linearity: ≤ 2% of setting at power levels above 10% of rated power Frequency: Fixed Frequency of 6.78 MHz Dimensions: 7" H x 19" W x 21.5" D (17.8 cm x 48.3 cm x 54.6 cm) Weight: 132 lbs. (60 kg) Cooling: Water: 1.5 GPM (5.7 liters) Certification: ETL Marked, Semi F47OEM 모델 설명
RF Generator문서
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COMDEL
CX-2500
카테고리
Power Supplies
마지막 검증일: 60일 이상 전
주요 품목 세부 정보
조건:
Used
작동 상태:
Deinstalled / Uncrated
제품 ID:
126886
웨이퍼 사이즈:
알 수 없음
빈티지:
1999
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
설명
Comdel CX-2500/6.78 MHz 2500 W RF Generator, PN: FP3368R1 Description: The CX-2500 power supply has a power range of 2500 Watts with a fixed frequency of 6.78 MHz. The solid-state design provides low cost of ownership with high reliability. Applications: The CX series is designed to meet the performance demand in RF-driven plasma systems for semiconductor processing. Applications include etch, RIE, parallel plate, ICP, RF sputtering, CVD and PVD, as well as induction and dielectric heating processes in industrial systems.환경 설정
The Unit's Serial Number Tag Reads: Model Number: CX-2500/6.78 Serial Number: 091 Part Number: FP3368R1 Date of Manufacturing: 10/29/99 Specifications: Power Output: 2500 W Harmonic Distortion: Less than -30 dBc Power Requirements: 190-225 VAC; Three Phase; 50/60 Hz / 15 A typical Control I/O Connector: 25-pin subiminiature D type Std. Output Connector: Type-N Power Control: 0-10 VDC input for 0 to maximum-rated output Power Control Linearity: ≤ 2% of setting at power levels above 10% of rated power Frequency: Fixed Frequency of 6.78 MHz Dimensions: 7" H x 19" W x 21.5" D (17.8 cm x 48.3 cm x 54.6 cm) Weight: 132 lbs. (60 kg) Cooling: Water: 1.5 GPM (5.7 liters) Certification: ETL Marked, Semi F47OEM 모델 설명
RF Generator문서
문서 없음