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설명
Stylus surface profiler Applications: - Step Height mesurements (2D/3D) - Roughness and Waviness - Bow and Shape - Thin film Stress - Defect review ( Defect surface topography)환경 설정
- Wafer size : up to 8 inch - Microhead 5-xr (13, 131, 1048 um range) - Stylus tip (green): 2um radius - Objective lens : 6.4x, Magnification range : 173x~750x - Step height: Nanometers to 1000µ;m - Step height repeatability : 4 Å; ( 1σ, 1µ;m ) - Programmable stylus force from 0.5 –; 50mg (Option : 0.03 ~50mg ) - Scan full diameter of the sample without stitching for bow and film stress measurement - Fully motorized 200mm XY stage, Z stage, 360° theta stage and level stage - Dual view optics ( side and top ) - Fully automated with sequencing, pattern recognition - OS : Windows 7, S/W : Profiler v8.0, Apex Advanced Analysis(Option)OEM 모델 설명
The new Tencor P-7 and P-17 products feature industry-leading measurement precision, the highest resolution color camera available on a stylus platform, and new performance specifications for long-scan capability critical for bow and stress measurements.문서
문서 없음
유사 등재물
모두 보기
KLA
P-17
카테고리
Profiler
마지막 검증일: 60일 이상 전
주요 품목 세부 정보
조건:
Used
작동 상태:
알 수 없음
제품 ID:
115116
웨이퍼 사이즈:
8"/200mm
빈티지:
2017
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설명
Stylus surface profiler Applications: - Step Height mesurements (2D/3D) - Roughness and Waviness - Bow and Shape - Thin film Stress - Defect review ( Defect surface topography)환경 설정
- Wafer size : up to 8 inch - Microhead 5-xr (13, 131, 1048 um range) - Stylus tip (green): 2um radius - Objective lens : 6.4x, Magnification range : 173x~750x - Step height: Nanometers to 1000µ;m - Step height repeatability : 4 Å; ( 1σ, 1µ;m ) - Programmable stylus force from 0.5 –; 50mg (Option : 0.03 ~50mg ) - Scan full diameter of the sample without stitching for bow and film stress measurement - Fully motorized 200mm XY stage, Z stage, 360° theta stage and level stage - Dual view optics ( side and top ) - Fully automated with sequencing, pattern recognition - OS : Windows 7, S/W : Profiler v8.0, Apex Advanced Analysis(Option)OEM 모델 설명
The new Tencor P-7 and P-17 products feature industry-leading measurement precision, the highest resolution color camera available on a stylus platform, and new performance specifications for long-scan capability critical for bow and stress measurements.문서
문서 없음