설명
Used. Just taken offline in 2021/07 and not able to run the equipment now. If there are any questions or you need more info, please contact us.환경 설정
1. Reactor Chamber: SUS 304, approximately: 900 diameter x H1,000 (mm) 2. Vacuum Pump: Ulvac Cryo-U 16H, cryogenics pump with C30VR compressor(16,000 l/s) and HanBell PS-602, Oil-free Dry pump station system(10,000 liters/min), with 1 roots pump and 1 oil-free dry pump 3. Sputter Cathodes: 2 X Cello, Plane rectangular magnetron enhanced sputter cathodes for general material (20" X 5") 4. RF Pre-Cleaning Set: AE Cesar, RF 1.0 kW power supply and auto-matching network with RF electrode set in chamber 5. Substrate Holder: 1 set of 12 substrate carriers pre-machined to accept at least total 36 pieces of 4" diameter wafers. (Backside fitting)OEM 모델 설명
미제공문서
문서 없음
CELLO
OHMIKER-90BS (S006)
검증됨
카테고리
PVD / Sputtering
마지막 검증일: 60일 이상 전
주요 품목 세부 정보
조건:
Used
작동 상태:
알 수 없음
제품 ID:
47751
웨이퍼 사이즈:
알 수 없음
빈티지:
2012
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
CELLO
OHMIKER-90BS (S006)
카테고리
PVD / Sputtering
마지막 검증일: 60일 이상 전
주요 품목 세부 정보
조건:
Used
작동 상태:
알 수 없음
제품 ID:
47751
웨이퍼 사이즈:
알 수 없음
빈티지:
2012
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
설명
Used. Just taken offline in 2021/07 and not able to run the equipment now. If there are any questions or you need more info, please contact us.환경 설정
1. Reactor Chamber: SUS 304, approximately: 900 diameter x H1,000 (mm) 2. Vacuum Pump: Ulvac Cryo-U 16H, cryogenics pump with C30VR compressor(16,000 l/s) and HanBell PS-602, Oil-free Dry pump station system(10,000 liters/min), with 1 roots pump and 1 oil-free dry pump 3. Sputter Cathodes: 2 X Cello, Plane rectangular magnetron enhanced sputter cathodes for general material (20" X 5") 4. RF Pre-Cleaning Set: AE Cesar, RF 1.0 kW power supply and auto-matching network with RF electrode set in chamber 5. Substrate Holder: 1 set of 12 substrate carriers pre-machined to accept at least total 36 pieces of 4" diameter wafers. (Backside fitting)OEM 모델 설명
미제공문서
문서 없음