설명
Sputtering System환경 설정
CTI CT-8 cryo pump and water cooled compressor • Leybold Mech Pump • HVA hivac valve • MKS variable throttle valve • 4 Torus-magnetron target assemblies, • 2 gas system with 2 Vac Gen UltraFlo MFCs • Capacitance Manometer, MKS with 270 controller • AC power box with breakers • Manual control panel • G.P.-307 I.G. controller with dual I.G. readouts • Water flow panel with 4 Proteus flow meters • 1 A.E. MDX-1, 1Kw dc power supplies • 1 A.E. 600w RF generator • 1 A.E. RF matching unit • Superior stepper motor control for table motion • 4 6” pallet positions • Backside heater assembly with TC • Stepper motor controlledOEM 모델 설명
미제공문서
문서 없음
카테고리
PVD / Sputtering
마지막 검증일: 10일 전
주요 품목 세부 정보
조건:
Used
작동 상태:
알 수 없음
제품 ID:
156149
웨이퍼 사이즈:
알 수 없음
빈티지:
알 수 없음
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
KURT J LESKER
CMS-18
카테고리
PVD / Sputtering
마지막 검증일: 10일 전
주요 품목 세부 정보
조건:
Used
작동 상태:
알 수 없음
제품 ID:
156149
웨이퍼 사이즈:
알 수 없음
빈티지:
알 수 없음
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
설명
Sputtering System환경 설정
CTI CT-8 cryo pump and water cooled compressor • Leybold Mech Pump • HVA hivac valve • MKS variable throttle valve • 4 Torus-magnetron target assemblies, • 2 gas system with 2 Vac Gen UltraFlo MFCs • Capacitance Manometer, MKS with 270 controller • AC power box with breakers • Manual control panel • G.P.-307 I.G. controller with dual I.G. readouts • Water flow panel with 4 Proteus flow meters • 1 A.E. MDX-1, 1Kw dc power supplies • 1 A.E. 600w RF generator • 1 A.E. RF matching unit • Superior stepper motor control for table motion • 4 6” pallet positions • Backside heater assembly with TC • Stepper motor controlledOEM 모델 설명
미제공문서
문서 없음