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KLA OmniMap RS200+
    설명
    -8inch (Open Cassette) -F Probe(27.9kΩ/sq, 279.4Ω/sq, 2.794Ω/sq） -Galil Motion Controller -I7 Computer -Dual Probe Arm: P1 / P2 -LP1: 200mm OCA+ -LP2: 200mm OCA+ -RS SW: 10.0.0.6
    환경 설정
    -Measurement range: > 5 mΩ/sq. to < 5 MΩ/sq -Measurement repeatability, based on KLA-Tencor’s “Probe Qualification Test” @ 1” test diameter, using the appropriate probe head: < 0.2% (1σ) -Reproducibility: Representative metals (e.g. Cu, W, TiN) < 0.5% (1σ) -Edge exclusion: From the conductive film edge for the following the probe heads: 25 mil pitch -1 mm with “enhanced” probe position 25 mil pitch -3 mm with “standard” probe position 40 mil pitch -4 mm with “standard” probe position 62.5 mil pitch -5 mm with “standard” probe position -Temperature measurement accuracy: ± 0.5°C -Temperature measurement repeatability: ± 0.2°C -Throughput: based on 5-site test with wafer alignment, fixed current and temperature compensation. 200 mm Single SMIF: ≥ 110 WPH -Measurement Capabilities Routine check: 1-30 sites programmable (ASTM standard tests included) XY maps and flexible, user-defined patterns: up to 1,200 sites programmable -Analysis Capabilities Contour/3-D map: 49, 81, 121, 225, 361, 441, 625 sites Diameter scan: 49, 81, 121, 225, 361, 441, 625 sites Probe qualification test: 20 sites Trend charts Recipe editing and data extraction capability Average, difference and ratio maps Temperature coefficient of resistance correction
    OEM 모델 설명
    Sheet Resistance Measurement Systems The OmniMap® RS-200 resistivity mapping system, based on proven industry resistivity mapping standards, provides accurate and reliable sheet resistance measurement for 45nm and beyond. This resistivity mapping system provides capabilities such as advanced automation and improved edge performance to meet today's 300mm wafer production requirements.
    문서
    파일 아이콘

    KLA RS200+.pdf

    KLA

    OmniMap RS200+

    verified-listing-icon

    검증됨

    카테고리
    Resistivity / Four Point Probe

    마지막 검증일: 60일 이상 전

    주요 품목 세부 정보
    조건:

    Used

    작동 상태:

    Installed / Running

    제품 ID:

    111610

    웨이퍼 사이즈:

    알 수 없음

    빈티지:

    알 수 없음

    Have Additional Questions?
    Logistics Support
    Available
    Money Back Guarantee
    Available
    Transaction Insured by Moov
    Available
    Refurbishment Services
    Available
    유사 등재물
    모두 보기
    KLA OmniMap RS200+

    KLA

    OmniMap RS200+

    Resistivity / Four Point Probe
    빈티지: 0조건: 중고
    마지막 검증일60일 이상 전

    KLA

    OmniMap RS200+

    verified-listing-icon
    검증됨
    카테고리
    Resistivity / Four Point Probe
    마지막 검증일: 60일 이상 전
    listing-photo-070ea67b8915473f89d973e2fd131336-https://media-moov-co.s3.us-west-1.amazonaws.com/user_media/listingPhoto/50345/070ea67b8915473f89d973e2fd131336/e2da67bb493243119b72cafdb5172dcc_f6a34097bcf74b13b2b9c7eae4f77f9445005c_mw.jpeg
    주요 품목 세부 정보
    조건:

    Used

    작동 상태:

    Installed / Running

    제품 ID:

    111610

    웨이퍼 사이즈:

    알 수 없음

    빈티지:

    알 수 없음

    Have Additional Questions?
    Logistics Support
    Available
    Money Back Guarantee
    Available
    Transaction Insured by Moov
    Available
    Refurbishment Services
    Available
    설명
    -8inch (Open Cassette) -F Probe(27.9kΩ/sq, 279.4Ω/sq, 2.794Ω/sq） -Galil Motion Controller -I7 Computer -Dual Probe Arm: P1 / P2 -LP1: 200mm OCA+ -LP2: 200mm OCA+ -RS SW: 10.0.0.6
    환경 설정
    -Measurement range: > 5 mΩ/sq. to < 5 MΩ/sq -Measurement repeatability, based on KLA-Tencor’s “Probe Qualification Test” @ 1” test diameter, using the appropriate probe head: < 0.2% (1σ) -Reproducibility: Representative metals (e.g. Cu, W, TiN) < 0.5% (1σ) -Edge exclusion: From the conductive film edge for the following the probe heads: 25 mil pitch -1 mm with “enhanced” probe position 25 mil pitch -3 mm with “standard” probe position 40 mil pitch -4 mm with “standard” probe position 62.5 mil pitch -5 mm with “standard” probe position -Temperature measurement accuracy: ± 0.5°C -Temperature measurement repeatability: ± 0.2°C -Throughput: based on 5-site test with wafer alignment, fixed current and temperature compensation. 200 mm Single SMIF: ≥ 110 WPH -Measurement Capabilities Routine check: 1-30 sites programmable (ASTM standard tests included) XY maps and flexible, user-defined patterns: up to 1,200 sites programmable -Analysis Capabilities Contour/3-D map: 49, 81, 121, 225, 361, 441, 625 sites Diameter scan: 49, 81, 121, 225, 361, 441, 625 sites Probe qualification test: 20 sites Trend charts Recipe editing and data extraction capability Average, difference and ratio maps Temperature coefficient of resistance correction
    OEM 모델 설명
    Sheet Resistance Measurement Systems The OmniMap® RS-200 resistivity mapping system, based on proven industry resistivity mapping standards, provides accurate and reliable sheet resistance measurement for 45nm and beyond. This resistivity mapping system provides capabilities such as advanced automation and improved edge performance to meet today's 300mm wafer production requirements.
    문서
    파일 아이콘

    KLA RS200+.pdf

    유사 등재물
    모두 보기
    KLA OmniMap RS200+

    KLA

    OmniMap RS200+

    Resistivity / Four Point Probe빈티지: 0조건: 중고마지막 검증일:60일 이상 전