개요

The OmniMap® RS75/tc is a resistivity mapping system designed to help semiconductor manufacturers perform accurate wafer characterization and critical production monitoring at substantially greater speeds. It addresses a wide variety of process applications where film thickness and sheet resistance are critical, such as ion implantation, metallization, diffusion, epitaxy and polysilicon. The RS75/tc model incorporates a patented temperature compensation (tc) solution, allowing the system to correct for temperature variations, dramatically affecting long-term repeatability, accuracy, and system-to-system matching. With measurement speed of approximately 1 second per test site, the tool can process a 25-slot cassette of 200mm wafers at over 100 wafers per hour. This includes five-site monitoring, with automatic temperature compensation and flat alignment. The RS75 series is offered in a variety of configurations to meet customer production requirements.