설명
Pellicle Mounting System환경 설정
· Used in mask production line. · Tool consists of; a pressure-controlled flow bench chamber, an automated SMIF POD factory interface, a toolbox unit, a reticle gripper assembly, and a control panel. · A pressure-controlled flow bench chamber: Consists of FFUs to facilitated steady stated down flow stream accompanied by grated flooring at the toolbox level. Exhaust unit enables recirculation of the air back to FFU. · Automated SMIF POD factory interface: Facilitates reticle transfer to toolbox unit for studs demount treatment. · Toolbox unit consists of; a top cover, four stud demount units (with ability to move along Y and Z axis), four heater block assembly (to modulate epoxy curing time). This is the main unit where facilitates studs demount treatment. · Reticle gripper assembly: Is used to transfer reticles to toolbox unit and back to SMIF POD factory interface. · Control panel: Facilitates software interface to navigate through studs demount sequences (start/end process). · SRT-100 is a semi-automated tool, where an operator performs reticle movement to toolbox prior to studs demount treatment. Operator then sends demount command through control panel to initiate the process.OEM 모델 설명
Reticle / Photomask equipment문서
문서 없음
ASML
RWT 100
카테고리
Reticle / Mask Inspection
마지막 검증일: 2일 전
주요 품목 세부 정보
조건:
Used
작동 상태:
알 수 없음
제품 ID:
155085
웨이퍼 사이즈:
12"/300mm
빈티지:
알 수 없음
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
설명
Pellicle Mounting System환경 설정
· Used in mask production line. · Tool consists of; a pressure-controlled flow bench chamber, an automated SMIF POD factory interface, a toolbox unit, a reticle gripper assembly, and a control panel. · A pressure-controlled flow bench chamber: Consists of FFUs to facilitated steady stated down flow stream accompanied by grated flooring at the toolbox level. Exhaust unit enables recirculation of the air back to FFU. · Automated SMIF POD factory interface: Facilitates reticle transfer to toolbox unit for studs demount treatment. · Toolbox unit consists of; a top cover, four stud demount units (with ability to move along Y and Z axis), four heater block assembly (to modulate epoxy curing time). This is the main unit where facilitates studs demount treatment. · Reticle gripper assembly: Is used to transfer reticles to toolbox unit and back to SMIF POD factory interface. · Control panel: Facilitates software interface to navigate through studs demount sequences (start/end process). · SRT-100 is a semi-automated tool, where an operator performs reticle movement to toolbox prior to studs demount treatment. Operator then sends demount command through control panel to initiate the process.OEM 모델 설명
Reticle / Photomask equipment문서
문서 없음