설명
Reticle Inspection환경 설정
· Factory Interface (FI) with 1 load port for SMIF pod RSP-200 · Imaging optics o Laser scan microscopy using 405nm semiconductor laser as light source. o Particle detection using PMT. o Particle observation mode with white LED light source and 2 million pixel CCD. 1-8x digital zoom available. o Average inspection time for 132mm x 132mm area is ≤ 7min including load and unload. o Dual optical path allowing mask scan on both chrome and glass side without flipping. · Minimum defect size scanning capability: o 0.1um and above for chrome blanks o 0.15um and above for glass side o >90% capture repeatability at detection limitOEM 모델 설명
미제공문서
문서 없음
유사 등재물
모두 보기
HORIBA
PR-PD2
카테고리
Reticle / Mask Inspection
마지막 검증일: 3일 전
주요 품목 세부 정보
조건:
Used
작동 상태:
알 수 없음
제품 ID:
155083
웨이퍼 사이즈:
12"/300mm
빈티지:
알 수 없음
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
설명
Reticle Inspection환경 설정
· Factory Interface (FI) with 1 load port for SMIF pod RSP-200 · Imaging optics o Laser scan microscopy using 405nm semiconductor laser as light source. o Particle detection using PMT. o Particle observation mode with white LED light source and 2 million pixel CCD. 1-8x digital zoom available. o Average inspection time for 132mm x 132mm area is ≤ 7min including load and unload. o Dual optical path allowing mask scan on both chrome and glass side without flipping. · Minimum defect size scanning capability: o 0.1um and above for chrome blanks o 0.15um and above for glass side o >90% capture repeatability at detection limitOEM 모델 설명
미제공문서
문서 없음