
설명
Others Reticle handler 1 Handler System Internal Transfer Unit 1 Main System MASK INSPECTION SYSTEM 1환경 설정
Software Version SL4.2.24OEM 모델 설명
The KLA-Tencor STARlight™ SL3UV is a product that provides comprehensive UV contamination inspection for deep ultra-violet (DUV) lithography. It assures reticle quality throughout the manufacturing process and their productive life in wafer fabrication. This is necessary due to the increased complexity of reticle manufacturing and new inspection challenges introduced by subwavelength lithography.문서
문서 없음
카테고리
Reticle / Mask Inspection
마지막 검증일: 어제
주요 품목 세부 정보
조건:
Used
작동 상태:
알 수 없음
제품 ID:
144643
웨이퍼 사이즈:
8"/200mm
빈티지:
2001
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
KLA
SL3UV URSA
카테고리
Reticle / Mask Inspection
마지막 검증일: 어제
주요 품목 세부 정보
조건:
Used
작동 상태:
알 수 없음
제품 ID:
144643
웨이퍼 사이즈:
8"/200mm
빈티지:
2001
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
설명
Others Reticle handler 1 Handler System Internal Transfer Unit 1 Main System MASK INSPECTION SYSTEM 1환경 설정
Software Version SL4.2.24OEM 모델 설명
The KLA-Tencor STARlight™ SL3UV is a product that provides comprehensive UV contamination inspection for deep ultra-violet (DUV) lithography. It assures reticle quality throughout the manufacturing process and their productive life in wafer fabrication. This is necessary due to the increased complexity of reticle manufacturing and new inspection challenges introduced by subwavelength lithography.문서
문서 없음