설명
Tool was custom designed and built by Kurt Lesker환경 설정
Key Features • Chamber accommodates 8” (200mm) wafers • Designed to be compatible with cluster tools. • Vacuum system: designed for Ultra High Vacuum (7x10-7 Torr). • Main: Pfeiffer 790L/s Turbomolecular pump with VAT • Load lock: Pfeiffer 67 L/s turbo pump • Roughing pump: Edwards NXDS10I Mechanical scroll pump • Control software and interlocks • Automated heavy duty linear transfer arm • Multiple ports and windows • Multiple gas inlets • Large central port for induction or other feedthrough • High frequency induction heating power source available (Ambrell 6kW)OEM 모델 설명
미제공문서
카테고리
RTP/RTA
마지막 검증일: 어제
주요 품목 세부 정보
조건:
New
작동 상태:
Deinstalled / Uncrated
제품 ID:
147197
웨이퍼 사이즈:
8"/200mm
빈티지:
2022
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
KURT J LESKER
CUSTOM
카테고리
RTP/RTA
마지막 검증일: 어제
주요 품목 세부 정보
조건:
New
작동 상태:
Deinstalled / Uncrated
제품 ID:
147197
웨이퍼 사이즈:
8"/200mm
빈티지:
2022
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available