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설명
설명 없음환경 설정
Comprises of: -Main frame -IBM Thinkcentre PC with Intel Pentium CPU The system was configured for use with 2 x 200 mm open cassettes -single arm PRI/Equip ATM robot (Missing) -2 x 8 inch wafer cassette plates -BROOKS AUTOMATION pre-aligner (Missing) -Internal NESLAB CHILLER -Relay panel PCB -N2 PURGE gas supply line fitted with Unit MFC N2 20 slm MFC and SISPAN analog pressure indicator. -Gas Line 1 fitted with Unit MFC O2 10 slm MFC and SISPAN analog pressure indicator. -Gas line 2 fitted with Unit MFC NH3 10 slm MFC and SISPAN analog pressure indicator. -Gas Line 3 fitted with Unit MFC O2 1 slm MFC and SISPAN analog pressure indicator. -Gas line 4 fitted with Unit MFC Ar 10 slm MFC and SISPAN analog pressure indicator. -Input electrical power requirements: 200V 60 HZ 3 PHASE MAX AMPS PER PHASE: 86 MAX LAMP CURRENT PER PHASE: 78 AOEM 모델 설명
Rapid Thermal Processor The AG Associates Heatpulse 8108 system is a single-wafer, cassette-to-cassette rapid thermal processor, capable of processing in inert or corrosive ambients. The system is built for the production environment.문서
문서 없음
카테고리
RTP/RTA
마지막 검증일: 60일 이상 전
주요 품목 세부 정보
조건:
Used
작동 상태:
알 수 없음
제품 ID:
77923
웨이퍼 사이즈:
8"/200mm
빈티지:
1996
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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METRON / AG ASSOCIATES
HEATPULSE 8108
카테고리
RTP/RTA
마지막 검증일: 60일 이상 전
주요 품목 세부 정보
조건:
Used
작동 상태:
알 수 없음
제품 ID:
77923
웨이퍼 사이즈:
8"/200mm
빈티지:
1996
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
설명
설명 없음환경 설정
Comprises of: -Main frame -IBM Thinkcentre PC with Intel Pentium CPU The system was configured for use with 2 x 200 mm open cassettes -single arm PRI/Equip ATM robot (Missing) -2 x 8 inch wafer cassette plates -BROOKS AUTOMATION pre-aligner (Missing) -Internal NESLAB CHILLER -Relay panel PCB -N2 PURGE gas supply line fitted with Unit MFC N2 20 slm MFC and SISPAN analog pressure indicator. -Gas Line 1 fitted with Unit MFC O2 10 slm MFC and SISPAN analog pressure indicator. -Gas line 2 fitted with Unit MFC NH3 10 slm MFC and SISPAN analog pressure indicator. -Gas Line 3 fitted with Unit MFC O2 1 slm MFC and SISPAN analog pressure indicator. -Gas line 4 fitted with Unit MFC Ar 10 slm MFC and SISPAN analog pressure indicator. -Input electrical power requirements: 200V 60 HZ 3 PHASE MAX AMPS PER PHASE: 86 MAX LAMP CURRENT PER PHASE: 78 AOEM 모델 설명
Rapid Thermal Processor The AG Associates Heatpulse 8108 system is a single-wafer, cassette-to-cassette rapid thermal processor, capable of processing in inert or corrosive ambients. The system is built for the production environment.문서
문서 없음