설명
Standalone RTP Equipment환경 설정
환경 설정 없음OEM 모델 설명
Modular process technology RTP-600S Rapid Thermal Processing System. The integrated process control system features real time graphics, recipe management, data acquisition and has a comprehensive diagnostic function. Wafer size up to 6 in. Temp Range 250 to 1300 deg C (I wouldn't take it that high, maybe 1100C for short times). Quartz chamber (not included). Up to six channels of MFC control (Equipped with 3 channels). Highly uniform loop array with accurate control and monitoring. 208V, 3Ph, 60Hz, 80A.문서
문서 없음
MODULAR PROCESS TECHNOLOGY / MPTC
RTP-600S
검증됨
카테고리
RTP/RTA
마지막 검증일: 19일 전
주요 품목 세부 정보
조건:
Used
작동 상태:
알 수 없음
제품 ID:
113895
웨이퍼 사이즈:
6"/150mm
빈티지:
알 수 없음
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
유사 등재물
모두 보기MODULAR PROCESS TECHNOLOGY / MPTC
RTP-600S
카테고리
RTP/RTA
마지막 검증일: 19일 전
주요 품목 세부 정보
조건:
Used
작동 상태:
알 수 없음
제품 ID:
113895
웨이퍼 사이즈:
6"/150mm
빈티지:
알 수 없음
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
설명
Standalone RTP Equipment환경 설정
환경 설정 없음OEM 모델 설명
Modular process technology RTP-600S Rapid Thermal Processing System. The integrated process control system features real time graphics, recipe management, data acquisition and has a comprehensive diagnostic function. Wafer size up to 6 in. Temp Range 250 to 1300 deg C (I wouldn't take it that high, maybe 1100C for short times). Quartz chamber (not included). Up to six channels of MFC control (Equipped with 3 channels). Highly uniform loop array with accurate control and monitoring. 208V, 3Ph, 60Hz, 80A.문서
문서 없음