설명
The Hitachi SCDS is designed for processing PFC gases used in semiconductor fabrication. The system features a 60l/min gas throughput and decomposition rates of over 99.4% for CF4, C2F6, CHF3, C3F8, C4F8, NF3, CO and SF6. The Hitachi SCDS offers superior cost of ownership versus Capture/Re-cycle; Combustion; or Chemical Conversion technologies since it uses little electricity, only 1 gpm of water, and has a catalyst lifetime of more than 4,600 hours. The SCDS-60 has a footprint of only 37" Wx19.5 " Dx77"H. and is fully S2-93 and CE compliant.환경 설정
환경 설정 없음OEM 모델 설명
미제공문서
문서 없음
HITACHI
SCDS CD-60
검증됨
카테고리
Scrubbers - Process Gases
주요 품목 세부 정보
조건:
Used
작동 상태:
알 수 없음
제품 ID:
43476
웨이퍼 사이즈:
알 수 없음
빈티지:
2000
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
HITACHI
SCDS CD-60
검증됨
카테고리
Scrubbers - Process Gases
마지막 검증일: 60일 이상 전
주요 품목 세부 정보
조건:
Used
작동 상태:
알 수 없음
제품 ID:
43476
웨이퍼 사이즈:
알 수 없음
빈티지:
2000
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
설명
The Hitachi SCDS is designed for processing PFC gases used in semiconductor fabrication. The system features a 60l/min gas throughput and decomposition rates of over 99.4% for CF4, C2F6, CHF3, C3F8, C4F8, NF3, CO and SF6. The Hitachi SCDS offers superior cost of ownership versus Capture/Re-cycle; Combustion; or Chemical Conversion technologies since it uses little electricity, only 1 gpm of water, and has a catalyst lifetime of more than 4,600 hours. The SCDS-60 has a footprint of only 37" Wx19.5 " Dx77"H. and is fully S2-93 and CE compliant.환경 설정
환경 설정 없음OEM 모델 설명
미제공문서
문서 없음