개요

FE-SEM The new SU8000 features a top detector along with a semi-in-lens type of objective lens. This technology is a further advance on the popular upper backscattered electron detector used in the S-5500. By combining the top detector with the conventional upper detector technology, Hitachi has now developed a new signal detection system for optimum contrast visualization of signals, generated from the sample. These signals include secondary electrons, low-angle backscattered electrons and high-angle backscattered electrons, which are acquired for observation of surface structures.