개요

Hitachi High-Tech Corporation has developed the Ethos NX5000 high-performance FIB(*1)-SEM(*2), which combines a high-intensity cold-cathode field emission electron gun technology with a newly developed magnetic/electrostatic compound lens (or dual-mode lens). The Hitachi Ethos FIB-SEM incorporates the latest-generation FE-SEM with superb beam brightness and stability. Ethos delivers high-resolution imaging at low voltages combined with ion optics for nanoscale precision processing.