개요

The S-4800 is an advanced Field Emission Scanning Electron Microscope (FE-SEM) that builds upon the proven performance of its predecessors, the S-4700 and S-5200. With beam deceleration technology, it achieves an impressive resolution of 1.4 nm at 1 kV and 1.0 nm at 15 kV. The microscope features a semi-in-lens detector design, allowing for the examination of large samples without compromising ultra-high resolution at low accelerating voltages. The innovative objective lens design incorporates Hitachi's Super ExB filter technology, which effectively separates pure secondary electrons (SE), compositional SE, and backscattered electron (BSE) signals. With a specimen diameter of 200 mm and a 5-axis motorized eucentric stage, it offers exceptional sample accommodation and positioning capabilities. The S-4800 is compatible with optional accessories such as Energy Dispersive X-ray Spectrometer (EDX) and Electron Backscatterted Diffraction Pattern (EBDP) systems, making it suitable for a range of ultra-high resolution applications in fields like semiconductor research, materials studies, and nanotechnology.