설명

FE-SEM (Type I) Condition: Working

환경 설정

1-1 Performance (FE-SEM) Image resolution : 1.0nm at 15kV : 1.4nm at 1kV Accelerating voltage : 0.5 to 30kV Magnification : LM mode 20x to 2,000x : HM mode 100x to 800,000x 1-2 Sample Stage (Type I) Movement : X: 50mm, Y: 50mm , Z: 1.5 ~ 30mm Tilt: -5° ~ +70°, Rotation : 360° Sample size : 100mm (Max) Sample holder : 25mm Sample exchange : Airrock type Stage drive : X,Y,Z,T,R - 5-axis Fully Motorized 1-3 Electron Optics Electron Gun : Cold field emission source (Life time : minimum 5 years) Lens System : 3-stage electromagnetic lens Objective apergure : 4-opennings, selectable & alignable from outside the vacuum Stigmator : Electromagnetic octapole type Scanning coil : 2-stage electromagnetic deflection 1-4 Display System Imaging signal : Secondary Electron Image (SEI) Display : 19 inch viewing (TFT LCD Monitor x1ea) Frame memory : 640 X 480, 1,280 X 960, 2,560x1,920, 5,120x3,840 pixels Image processing : Auto image Brightness control Auto image Contrast control Dynamic stigmator monitor Electrical image shift : ±12um (W/D = 8mm) Auto data display : Number, Accelating voltage, magnification, micron bar Windows : Window XP 1-5 Vaccum Control System : Full automatic, pneumatic valve control Ultimate vacuum : Electron gun (10-7 Pa) Sample chamger (10-4 Pa) Vacuum pump : IP x 1 : 60L/s IP x 2 : 20L/x IP-3 : 7 × 10-5 Pa or better Turbomolecular Pump (300 l/s) x 1ea Rotary pump (133 l/min) x 1ea Vacuum gauge : Sample chamber (Penning gauge) Exchange chamber (Pirani gauge)

OEM 모델 설명

The S-4800 is an advanced Field Emission Scanning Electron Microscope (FE-SEM) that builds upon the proven performance of its predecessors, the S-4700 and S-5200. With beam deceleration technology, it achieves an impressive resolution of 1.4 nm at 1 kV and 1.0 nm at 15 kV. The microscope features a semi-in-lens detector design, allowing for the examination of large samples without compromising ultra-high resolution at low accelerating voltages. The innovative objective lens design incorporates Hitachi's Super ExB filter technology, which effectively separates pure secondary electrons (SE), compositional SE, and backscattered electron (BSE) signals. With a specimen diameter of 200 mm and a 5-axis motorized eucentric stage, it offers exceptional sample accommodation and positioning capabilities. The S-4800 is compatible with optional accessories such as Energy Dispersive X-ray Spectrometer (EDX) and Electron Backscatterted Diffraction Pattern (EBDP) systems, making it suitable for a range of ultra-high resolution applications in fields like semiconductor research, materials studies, and nanotechnology.