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설명 없음

환경 설정

Resolution: - 1nm guaranteed at 15kV SEM mode - 2.5nm at 1kV in SEM mode - 1.5nm at 1kV in GB mode Magnification: - SEM: x100 (at WD 25mm) to x1,000,000 (at WD 8mm) - Low-Mag LM mode: x25 to x19,000 Imaging Modes/Detectors: - SEI: Secondary electron imaging - LM: Low-magnification mode - GB: Gentle-Beam mode Accelerating Voltages: - SEM: 0.5 to 30kV - GB: 0.1 to 4.0kV Mechanical: - Max: 70 x 50mm - 4inch wafer: limited to 25x25mm movement area from wafer center - Tilt: -5* to 70* - Rotation: 360*

OEM 모델 설명

The JSM-7600F is a state-of-the-art Scanning Electron Microscope (SEM) that combines ultra-high-resolution imaging with enhanced analytical capabilities. It boasts a resolution of 1.5 nm at 1 kV in GB mode and 1.0 nm at 15 kV, with an accelerating voltage ranging from 0.1 kV to 30 kV. The microscope offers a magnification range from 25x to 1,000,000x, providing ultra-high-resolution imaging comparable to cold FEG SEM. This SEM is equipped with an in-lens thermal FE gun and an aperture angle control lens, ensuring optimum beam projection regardless of the probe current level. It also offers robust analytical capabilities at a maximum probe current of 200 nA at 15 kV, supporting various types of sample analysis such as WDS and EDC. The JSM-7600F features an r-filter for controlling the energy selection and image mixture rate for secondary electron and backscattered electron images. Its Gentle Beam mode minimizes beam damage for ultra-surface imaging. Designed with energy efficiency and environmental friendliness in mind, this powerful FE-SEM is a valuable tool for any laboratory.