설명
SST531 280 50Wafer tested with DI-Water Levitronix Controller missing Details Attached환경 설정
-Voltage 3x400V+N+PE 35A max -Dimension 2100x1087x1867mm LxWxH -3 Hetated, 2 Unheated Tanks -280er Chamber for 50 Wafers 8“ -Tank 1,2 was used for EKC 265, Tank 3,4 for IPA -Additional tank Nb. 5 for tests, equipped with a Fillvessel and Metering pump. T5 Supply by external CDA cabinet. -2xFume Sensors Bieler+Lang -5x Levitronix Pumps BSM 4.2 + LC325 -Rotor 50 Wafer for Clampshell -SECS GEMOEM 모델 설명
미제공문서
SEMITOOL
SST531
카테고리
Spray Solvent / Acid
마지막 검증일: 10일 전
주요 품목 세부 정보
조건:
Used
작동 상태:
알 수 없음
제품 ID:
137243
웨이퍼 사이즈:
알 수 없음
빈티지:
2012
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available