개요

The CANON FPA-2000i1 is an advanced i-line wafer stepper that allows printing high-density VLSI devices and produces devices with the highest yields possible. The printing wavelength of the CANON FPA-2000i1 stepper is i-line (365 nm). The wafer size for the CANON FPA-2000i1 stepper is up to 4 inches and the reticle size is 5 inches. The numerical aperture of the CANON FPA-2000i1 stepper is 0.52.