개요

The Ultratech 1600 DSA, also known as the NanoTech 160, is a wafer stepper system that can align wafers on both the front and back sides. It has non-contact lithography capabilities and can place multiple lithography layers on a single reticle. It also has off-axis MVS with focus and illumination controls, high wafer plane irradiance, and can be easily integrated with existing processes. Its compact system footprint makes it an ideal choice for high-volume chip production and prototyping.