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PAS 5000/55A
개요
The PAS 5000/55A steppers use a 0.48 NA i-Line lens with a.21.2 mm image field diameter. These steppers are optimized for 0.50 μm production resolutions and are ideal for all types of IC production, from telecommunications to ASICs, and on various substrates, from Silicon to GaAs.
활성 등재물
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서비스
검사, 보험, 감정, 물류
