개요

The 193nm FPA-5000AS3 scanner, which incorporates high-purity calcium fluoride lens technology within its projection optics, features a newly developed, low-aberration 4:1 reduction projection lens with a high 0.75 numerical aperture (NA), according to Canon. It features overlay alignment accuracy of less than 20nm while moving 350mm per second.achieve throughput rates of approximately 105 wafers per hour (wph)