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NSR-2005i14E2
개요
A projection lens offers a peak NA of 0.63 and achieves a resolution of 350 nm or better. Through modified illumination, it allows optimization of various processing conditions for 256M DRAM mass production.
활성 등재물
0
서비스
검사, 보험, 감정, 물류
상위 등재물
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