개요

The Model NSR-2005i8A is an i-line stepper designed for mass producing large die size, half micron devices. With a 6 in. reticle, it can generate three 16Mb DRAM chips in a single exposure. The exposure area is 15.9 mm x 25.2 mm with 6 in. reticles and 20 mm x 20 mm with 5 in. reticles. It is fully compatible with Nikon Precision Inc.'s NSR-1505/1755 Series steppers for existing customers.